NANO ASMPT Die Bonder and Flip Chip Bonder
Feature
●Accuracy ± 0.3 µm @ 3s
●Support all die bonding and polycrystalline applications
●High-precision alignment of optical components
●Vibration reduction system
●Automatic placement and offset adjustment system
●High-precision 300 mm die bonding table
●Dynamic calibration system
●Quantitative parallelism calibration
●In-situ eutectic bonding ability
●Three different heating options, including laser welding system
●Active die bond strength control, from 0.1 to 20N
●Glue/spray glue solid crystal
●UV curing function is provided on the solid crystal table
●Post-bonding inspection and wafer positioning software
●The clean room is equipped with HEPA filter and static eliminator
●The machine is designed in modular form
Size
Width, depth and height
1690 x 1430 x 2040 mm